The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Jan. 09, 2017
Applicant:
The Trustees of Columbia University IN the City of New York, New York, NY (US);
Inventors:
James S. Im, New York, NY (US);
Wenkai Pan, New York, NY (US);
Assignee:
THE TRUSTEES OF COLUMBIA UNIVERSITY IN THF CITY OF NEW YORK, New York, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B23K 26/00 (2014.01); B23K 26/354 (2014.01); B23K 26/082 (2014.01); B23K 26/0622 (2014.01); B23K 26/08 (2014.01); H01L 27/12 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); B23K 103/16 (2006.01); B23K 103/00 (2006.01); B23K 101/40 (2006.01); B23K 26/06 (2014.01); B23K 26/073 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02686 (2013.01); B23K 26/0006 (2013.01); B23K 26/0622 (2015.10); B23K 26/082 (2015.10); B23K 26/0861 (2013.01); B23K 26/354 (2015.10); H01L 21/02532 (2013.01); H01L 21/02691 (2013.01); H01L 27/1274 (2013.01); H01L 29/6675 (2013.01); H01L 29/78672 (2013.01); B23K 26/0626 (2013.01); B23K 26/073 (2013.01); B23K 2101/40 (2018.08); B23K 2103/172 (2018.08); B23K 2103/56 (2018.08); H01L 21/02683 (2013.01);
Abstract
Methods and systems for crystallizing a thin film provide a laser beam spot that is continually advanced across the thin film to create a sustained complete or partial molten zone that is translated across the thin film, and crystallizes to form uniform, small-grained crystalline structures or grains.