The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2022
Filed:
Mar. 09, 2020
Kabushiki Kaisha Toshiba, Tokyo, JP;
Toshiba Electronic Devices & Storage Corporation, Tokyo, JP;
Tatsuya Shiraishi, Nonoichi Ishikawa, JP;
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION, Tokyo, JP;
Abstract
A method for manufacturing a semiconductor device includes forming a trench in a semiconductor wafer; and forming a first insulating film by thermally oxidizing the semiconductor wafer. The first insulating film covers an inner surface of the trench so that a first space remains in the trench. The first insulating film has a recessed portion at the bottom of the trench. The method further includes forming a semiconductor layer on the first insulating film, the semiconductor layer filling the first space and the recessed portion; forming a second space in the trench by selectively removing the semiconductor layer so that a portion of the semiconductor layer remains in the recessed portion; forming a second insulating film in the recessed portion by thermally oxidizing the portion of the semiconductor layer; and forming a first conductive body in the trench, the first conductive body filling the second space.