The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2022

Filed:

Apr. 19, 2021
Applicant:

Seiko Epson Corporation, Toyko, JP;

Inventor:

Kazuyuki Nagata, Minowa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 15/18 (2013.01); G01P 15/08 (2006.01); G01P 21/00 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); G01P 15/0802 (2013.01); G01P 15/18 (2013.01); G01P 21/00 (2013.01); G01P 2015/0865 (2013.01);
Abstract

The inertial sensor includes a substrate, stationary electrodes provided to the substrate, an element section including a movable body which is displaceable with respect to the stationary electrodes, and which has electrodes in a first portion and a second portion opposed to the stationary electrodes, a protrusion which limits a displacement of the movable body, and which has a detection electrode in a portion opposed to the first portion of the movable body, a drive circuit for outputting a drive signal to the element section, a contact detection circuit for outputting a detection signal due to a contact between the electrode in the first portion of the movable body and the detection electrode of the protrusion, a self-diagnostic circuit for outputting a test signal to the element section when receiving the detection signal from the contact detection circuit, and a determination circuit for determining whether or not a level of a signal output by the element section in response to the test signal is out of a threshold value.


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