The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 06, 2022

Filed:

Feb. 26, 2018
Applicant:

Taketomo Nakane, Tokyo, JP;

Inventor:

Taketomo Nakane, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01N 27/04 (2006.01); H01L 21/311 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01N 27/048 (2013.01); G01N 27/227 (2013.01); H01L 21/311 (2013.01); H01L 28/60 (2013.01); G01N 2201/00 (2013.01);
Abstract

A humidity sensor includes a lower electrode formed above a substrate, a first humidity sensing film covering the lower electrode, an upper electrode formed above the first humidity sensing film, and a second humidity sensing film covering the upper electrode and making contact with the first humidity sensing film through openings of the upper electrode. The upper electrode has a predetermined opening pattern. The area of the upper electrode is larger than the area of the lower electrode, and is smaller than the area of the first humidity sensing film.


Find Patent Forward Citations

Nakane, Taketomo. (2022). Humidity sensor (U.S. Patent No. 11435310). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11435310

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…