The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Nov. 05, 2019
Applicant:
Excelitas Technologies Corp., Waltham, MA (US);
Inventors:
James W. Getz, Mount Pleasant, SC (US);
Peter S. Whitney, Bedford, MA (US);
Assignee:
Excelitas Technologies Corp., Waltham, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 5/183 (2006.01); B81B 7/02 (2006.01); H01S 5/04 (2006.01); H01S 5/02345 (2021.01); H01S 5/026 (2006.01); H01S 5/02 (2006.01);
U.S. Cl.
CPC ...
H01S 5/18366 (2013.01); B81B 7/02 (2013.01); H01S 5/0215 (2013.01); H01S 5/0261 (2013.01); H01S 5/02345 (2021.01); H01S 5/041 (2013.01); H01S 5/18355 (2013.01); H01S 5/18369 (2013.01);
Abstract
A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.