The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2022

Filed:

Sep. 28, 2020
Applicant:

Fuji Electric Co., Ltd., Kawasaki, JP;

Inventor:

Keiji Okumura, Matsumoto, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/482 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01); H01L 29/739 (2006.01); H01L 29/78 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 23/4824 (2013.01); H01L 29/4238 (2013.01); H01L 29/1608 (2013.01); H01L 29/4916 (2013.01); H01L 29/7397 (2013.01); H01L 29/7813 (2013.01);
Abstract

In an inactive region of an active region, a gate pad, a gate poly-silicon layer, and a gate finger are provided at a front surface of a semiconductor substrate, via an insulating film. The gate poly-silicon layer is provided beneath the gate pad, sandwiching the insulating film therebetween. The gate pad, the gate poly-silicon layer, a gate finger, gate electrodes of a trench gate structure, a gate finger, and a second measurement pad are electrically connected in the order stated. As a result, the gate electrodes where parasitic resistance occurs and the gate poly-silicon layer where built-in resistance occurs are connected in series between the second measurement pad and the gate pad. A resistance value of the overall gate resistance that is a combined resistance of the built-in resistance and the parasitic resistance may be measured by the second measurement pad.


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Okumura, Keiji. (2022). Semiconductor device (U.S. Patent No. 11430714). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11430714

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