The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2022

Filed:

Oct. 23, 2019
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Amir Tavakkoli Kermani Ghariehali, Austin, TX (US);

Edward Brian Fletcher, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/02 (2006.01); G03F 7/00 (2006.01); B29C 35/08 (2006.01); B29C 43/02 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 35/0805 (2013.01); B29C 43/021 (2013.01); B29C 59/02 (2013.01); G03F 7/0035 (2013.01); G03F 7/2022 (2013.01); G03F 9/7042 (2013.01); B29C 2035/0833 (2013.01); B29C 2043/025 (2013.01); B29C 2059/023 (2013.01); B82Y 40/00 (2013.01);
Abstract

Systems and methods for shaping a film. Formable material in an imprint field on the substrate may be contacted with a shaping surface of a template. Outer boundaries of the imprint field correspond to outer boundaries of the shaping surface. Shaping the film includes forming a cured layer within the imprint field while the shaping surface is in contact with the formable material. Shaping the film may include separating the shaping surface from the cured layer. Shaping the film may include moving the template away from the imprint field to a first offset location wherein the outer boundaries of the shaping surface are offset relative to the outer boundaries of the imprint field. Shaping the film may include curing a second portion of the formable material while the template is at the first offset location so as to form the shaped film.


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