The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2022

Filed:

Dec. 15, 2020
Applicant:

Hua Hong Semiconductor (Wuxi) Limited, Wuxi, CN;

Inventors:

Hao Wu, Wuxi, CN;

Bin Han, Wuxi, CN;

Xudong Li, Wuxi, CN;

Qiyi Yang, Wuxi, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 27/08 (2006.01);
U.S. Cl.
CPC ...
G01R 27/08 (2013.01); G01R 31/2601 (2013.01);
Abstract

The disclosure discloses a resistance test method using a Kelvin structure, which includes the following steps: step 1: providing a Kelvin test structure including a tested resistor, a first parasitic resistor, and a second parasitic resistor connected in series; step 2: applying first current to the two current test terminals and simultaneously testing first voltage in the two voltage test terminals; step 3: applying second current in a direction opposite to the direction of the first current to the two current test terminals and simultaneously testing second voltage in the two voltage test terminals; step 4: dividing a difference value obtained by subtracting the second voltage from the first voltage by a difference value between the first current and the second current to obtain the final test value of the tested resistor. The disclosure can reduce the resistance test error.


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