The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Sep. 21, 2020
Samsung Electronics Co., Ltd., Suwon-si, KR;
Kihak Nam, Daejeon, KR;
Sungyoon Ryu, Seoul, KR;
Kwangeun Kim, Hwaseong-si, KR;
Hwiwoo Park, Incheon, KR;
Dayoung Yoon, Incheon, KR;
Myoungkyu Choi, Incheon, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Advanced Technology Inc., Incheon, KR;
Abstract
According to embodiments, a wafer inspection device is provided. The wafer inspection device includes a porous chuck including a plurality of pores formed all over the porous chuck to allow pressure for fixing a wafer to be applied thereto, a chuck driving device, a back side inspection optical system configured to inspect a portion of a back surface of the wafer, and a position identification optical system, wherein the porous chuck includes a plurality of holes uniformly formed all over the porous chuck to partially expose the back surface of the wafer and a slit exposing the back surface of the wafer and extending in one direction parallel to a top surface of the porous chuck.