The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Jul. 11, 2017
Applicant:
Showa Denko K.k., Tokyo, JP;
Inventors:
Takanori Aoki, Tokyo, JP;
Katsumi Mikami, Kawasaki, JP;
Assignee:
SHOWA DENKO K.K., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17C 9/02 (2006.01); C23C 16/448 (2006.01); F17C 9/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4485 (2013.01); C23C 16/448 (2013.01); F17C 9/00 (2013.01); F17C 9/02 (2013.01); F17C 2205/0352 (2013.01); F17C 2227/0302 (2013.01); F17C 2250/043 (2013.01); F17C 2250/0439 (2013.01); F17C 2270/0518 (2013.01);
Abstract
Provided is a gas supply apparatus for supplying a gas compound obtained by vaporizing a liquid compound to a target location, the gas supply apparatus comprising: a storage vessel capable of storing the liquid compound; a gas compound supply pipeline, one end of which is connected to the storage vessel, and another end of which is capable of being disposed at the target location; and a temperature control device configured to adjust a temperature of the gas compound or the liquid compound within the storage vessel to be equal to or lower than a surrounding temperature of the gas compound supply pipeline.