The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Oct. 19, 2018
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); H01L 41/09 (2006.01); H01L 41/22 (2013.01); B81C 1/00 (2006.01); H01L 41/31 (2013.01); G02B 3/14 (2006.01); G02B 26/08 (2006.01); H01L 25/16 (2006.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 3/0051 (2013.01); B81C 1/00158 (2013.01); G02B 3/14 (2013.01); G02B 26/0875 (2013.01); H01L 25/16 (2013.01); H01L 41/0973 (2013.01); H01L 41/22 (2013.01); H01L 41/31 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/032 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2207/012 (2013.01); H01L 41/1876 (2013.01);
Abstract
A MEMS device comprising a body, having a first surface and a second surface; a diaphragm cavity in the body extending from the second surface of the body; a deformable portion in the body between the first surface and the diaphragm cavity; and a piezoelectric actuator, extending on the first surface of the body, over the deformable portion. The MEMS device is characterized in that it comprises a recess structure extending in the body and delimiting a stopper portion for the deformable portion.