The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2022
Filed:
Nov. 16, 2018
Applicant:
Sumco Corporation, Tokyo, JP;
Inventors:
Assignee:
SUMCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 9/032 (2006.01); B08B 9/035 (2006.01); B08B 5/04 (2006.01); C30B 15/04 (2006.01); C30B 29/06 (2006.01); C30B 15/00 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
B08B 9/0326 (2013.01); B08B 5/04 (2013.01); B08B 9/035 (2013.01); B08B 9/0328 (2013.01); C30B 15/04 (2013.01); C30B 29/06 (2013.01); B08B 2209/032 (2013.01); C30B 15/00 (2013.01); C30B 35/00 (2013.01);
Abstract
A cleaning method includes a first removal step of causing an inert gas to which a pulsation is applied to flow into an exhaust pipe after a silicon single crystal doped with an n-type dopant is produced, to peel and remove a deposit; and a second removal step of causing an atmospheric air to which no pulsation is applied to flow into the exhaust pipe through a chamber to burn a part of the deposit with the atmospheric air, the part being not removable in the first removal step, and peel and remove a burned substance of the deposit.