The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
May. 20, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Roman Gouk, San Jose, CA (US);
Han-Wen Chen, Cupertino, CA (US);
Steven Verhaverbeke, San Francisco, CA (US);
Jean Delmas, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C11D 11/00 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67034 (2013.01); B08B 7/0021 (2013.01); B08B 7/0035 (2013.01); C11D 11/0047 (2013.01); H01L 21/02101 (2013.01); H01L 21/6719 (2013.01); H01L 21/67126 (2013.01); H01L 21/68792 (2013.01); H01L 21/6704 (2013.01); H01L 21/67739 (2013.01); H01L 21/67748 (2013.01);
Abstract
Embodiments described herein generally relate to a processing chamber incorporating a small thermal mass which enable efficient temperature cycling for supercritical drying processes. The chamber generally includes a body, a liner, and an insulation element which enables the liner to exhibit a small thermal mass relative to the body. The chamber is also configured with suitable apparatus for generating and/or maintaining supercritical fluid within a processing volume of the chamber.