The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
May. 16, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Masayoshi Fujimoto, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A data generation method generates data for controlling an arrangement step in an imprint process that includes the arrangement step of arranging an imprint material on a substrate, a contact step of bringing the imprint material and a pattern portion of a mold into contact with each other, and a curing step of curing the imprint material. The method includes performing a first step of determining a plurality of first positions, based on information related to a boundary of the pattern portion in the substrate, as positions where the imprint material is to be arranged, and performing a second step of determining, after the first step, a plurality of second positions different from the plurality of first positions, as positions where the imprint material is to be further arranged.