The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Nov. 15, 2018
Applicant:
Edwards Vacuum Llc, Sanborn, NY (US);
Inventors:
Paul K. Mahoney, Attleboro, MA (US);
John J. Casello, Norton, MA (US);
Assignee:
Edwards Vacuum LLC, Sanborn, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
F04B 37/08 (2006.01); B01D 8/00 (2006.01); F25B 9/10 (2006.01); F04B 37/02 (2006.01); F04B 37/16 (2006.01);
U.S. Cl.
CPC ...
F04B 37/085 (2013.01); B01D 8/00 (2013.01); F04B 37/02 (2013.01); F04B 37/08 (2013.01); F04B 37/16 (2013.01); F17C 2227/0353 (2013.01); F25B 9/10 (2013.01);
Abstract
A cryopump has a cryogenic refrigerator with cold and colder stages that cool a radiation shield, a primary cryopumping array and a frontal array. The frontal array is coupled to the cold stage and is spaced from and wrapped around the frontally facing envelope of the primary cryopumping array. The frontal array may be recessed from the frontal opening and closer to the primary cryopumping array than to the frontal opening.