The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2022
Filed:
Apr. 17, 2019
Boe Technology Group Co., Ltd., Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
The present disclosure generally relates to nanostructure manufacturing. A method for fabricating an imprint template includes providing a first substrate including a first electrode layer on a first base layer and a plurality of first convex portions on a surface of the first electrode layer; providing a second substrate including a second electrode layer on a second base layer, a second resist layer on the second electrode layer, and a plurality of second convex portions on a surface of the second resist layer farthest from the second base layer, supplying electrical signals to the first electrode layer and the second electrode layer to produce an electric field between the plurality of first convex portions and the plurality of second convex portions; and forming the imprint template on the second substrate.