The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2022

Filed:

Mar. 27, 2019
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Hiroshi Komatsu, Shimosuwa, JP;

Hiroki Kawai, Matsumoto, JP;

Mitsuhiro Tateyama, Minowa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/113 (2006.01); H01L 41/083 (2006.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); H01L 41/083 (2013.01); H01L 41/1132 (2013.01);
Abstract

A sensor element includes a first reference potential side terminal located between a first signal side terminal and a second signal side terminal along a first axis passing through the first signal side terminal and the second signal side terminal in a plan view from a direction in which a first piezoelectric element and a second piezoelectric element are stacked and a second reference potential side terminal located between the first signal side terminal and the second signal side terminal along the first axis in the plan view from the direction. The first axis is located between the first reference potential side terminal and the second reference potential side terminal in the plain view from the direction.


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