The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Jun. 25, 2018
Jusung Engineering Co., Ltd., Gwangju-si, KR;
Dong Seok Chun, Gwangju-si, KR;
Jeong Mi Kim, Gwangju-si, KR;
Jong Sik Kim, Gwangju-si, KR;
Won Woo Jung, Gwangju-si, KR;
Min Ho Cheon, Gwangju-si, KR;
Chul Joo Hwang, Seongnam-si, KR;
Abstract
One embodiment of a substrate supporting apparatus comprises: a support member for supporting a substrate; and a temperature compensating member disposed at the edge of the support member, and compensating the temperature of the substrate, wherein the support member may be made of a light-transmissive material, the temperature compensating member may be made of an opaque material, and the surface of the temperature compensating member may be made of a material having corrosion resistance against a cleaning gas.