The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2022

Filed:

Mar. 30, 2017
Applicant:

Laser Imaging Systems Gmbh, Jena, DE;

Inventors:

Urban Scholz-Goerlach, Jena, DE;

Uwe Klowsky, Jena, DE;

Guenter Flemming, Zoellnitz, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/687 (2006.01); B25B 11/00 (2006.01); B41F 15/20 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); B25B 11/005 (2013.01); B41F 15/20 (2013.01); G03F 7/707 (2013.01); H01L 21/6875 (2013.01); H01L 21/68785 (2013.01);
Abstract

A device for fixing different-sized base area objects with a vacuum including on a table: first, second, and third vacuum chambers. The third chamber extending the first and second chambers to the entire x direction extension, and the second chamber having parallel, line-forming grooves in the x direction and connected to each other by a first connection channel in the y direction and being released/closed serially relative to the first chamber by a line-switching device. The third chamber includes parallel, column-forming grooves extending in the y direction and connected to each other via a second connection channel in the x direction and being released/closed serially relative to the first chamber by a column-switching device. The third chamber being released/closed serially in the y direction by the line-switching device, in a simultaneous, segmented manner according to the number and positions of the line-forming grooves in correspondence with the second chamber.


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