The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
May. 11, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventor:
Melvin Verbaas, Scottsdale, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/48 (2006.01); H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); C23C 16/4586 (2013.01); C23C 16/481 (2013.01); C23C 16/488 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67103 (2013.01); H01L 21/67161 (2013.01); H01L 21/67248 (2013.01); H01L 21/68735 (2013.01); H01L 21/68785 (2013.01); H01J 37/32449 (2013.01);
Abstract
A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.
Verbaas, Melvin. (2022). Radiation shield (U.S. Patent No. 11417545). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11417545
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile