The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Mar. 01, 2019
Hitachi, Ltd., Tokyo, JP;
Motohiro Takahashi, Tokyo, JP;
Takanori Kato, Tokyo, JP;
Naruo Watanabe, Tokyo, JP;
Hironori Ogawa, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The problem addressed by the present disclosure is to provide a stage device, a charged particle beam device, and a vacuum device, with which it is possible to increase the speed and the acceleration of positioning and to suppress the leakage of a magnetic field. As a means to resolve this problem, a stage devicecomprises a support stage, a floating mechanism, and a movement stage. The movement stagehas a propulsion-applying unit, and the support stagehas a propulsion-receiving unit. The stage deviceis configured so that when the movement stagemoves and the propulsion-applying unitcontacts or approaches the propulsion-receiving unit, the propulsion-applying unitapplies propulsion in the movement direction to the propulsion-receiving unit