The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Oct. 16, 2020
Applicant:
Molecular Imprints, Inc., Austin, TX (US);
Inventor:
Vikramjit Singh, Pflugerville, TX (US);
Assignee:
Molecular Imprints, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01); G02B 27/01 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0005 (2013.01); G02B 5/1857 (2013.01); G03F 7/0002 (2013.01); G03F 7/0037 (2013.01); G03F 7/40 (2013.01); G03F 7/7045 (2013.01); G02B 27/0172 (2013.01); G02B 2027/0118 (2013.01); G02B 2027/0178 (2013.01);
Abstract
Asymmetric structures formed on a substrate and microlithographic methods for forming such structures. Each of the structures has a first side surface and a second side surface, opposite the first side surface. A profile of the first side surface is asymmetric with respect to a profile of the second side surface. The structures on the substrate are useful as a diffraction pattern for an optical device.