The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Jan. 17, 2019
Hamamatsu Photonics K.k., Hamamatsu, JP;
Tomonori Nakamura, Hamamatsu, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;
Abstract
A carrier lifetime measurement method for measuring a lifetime of carriers in a measurement target object includes an irradiation step of irradiating a DUTserving as a measurement target object with measurement light and stimulus light subjected to intensity modulation using a plurality of frequencies, an outputting step of outputting a detection signal by detecting an intensity of reflected light from the DUTor transmitted light through the DUT, and a generation step of detecting a phase delay of the detection signal with respect to a modulation signal including a frequency in association with a concentration of impurities in a measurement target region of the plurality of frequencies and generating image data indicating a distribution of lifetimes of carriers in the DUTon the basis of the phase delay.