The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2022
Filed:
Mar. 26, 2020
Applicant:
Picosun Oy, Espoo, FI;
Inventors:
Assignee:
PICOSUN OY, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 16/02 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4583 (2013.01); C23C 16/0227 (2013.01); C23C 16/45527 (2013.01);
Abstract
A substrate holderin the form of a mesh structure with a sample-receiving surfaceA is provided. The substrate holdercontaining the samplesis at least partially folded and inserted into a substrate processing apparatus to produce coated samplesA by directing at least one coating material P, P, . . . , Pn onto the samples through the mesh structure. A substrate processing system and a method for producing coated substrates are further provided.