The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
Nov. 26, 2019
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Junichi Kimura, Tokyo, JP;
Yukari Inoue, Tokyo, JP;
Assignee:
TDK Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0815 (2013.01); H01L 41/187 (2013.01);
Abstract
A piezoelectric thin film deviceincludes a conductive layerand a piezoelectric thin filmlaminated directly on a surface of the conductive layer. The piezoelectric thin filmcontains a plurality of crystalline grains having a wurtzite structure, a (001) plane of at least a part of the crystalline grains is oriented in a normal direction Dof the surface of the conductive layer, and a median diameter of the plurality of crystalline grains in a direction parallel to the surface of the conductive layeris 30 nm or more and 80 nm or less.