The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
May. 13, 2020
Screen Holdings Co., Ltd., Kyoto, JP;
Hiroyuki Kawahara, Kyoto, JP;
Koji Hashimoto, Kyoto, JP;
Noriyuki Kikumoto, Kyoto, JP;
Noritake Sumi, Kyoto, JP;
SCREEN Holdings Co., Ltd., Kyoto, JP;
Abstract
A substrate processing apparatus includes a base portionthat is disposed in a manner of being adjacent to a chamber; a handthat holds a substrate S; an armthat is attached to the base portion, supports the hand, and moves the hand forward and rearward by horizontally moving the hand with respect to the base portion; and a cover portionthat accommodates the hand in an internal space. The cover portion has a cover main bodyforming the internal space and an extending memberhaving a hollow structure which penetrates the cover portion in a horizontal direction and of which one end serves as an openingand being engaged with the cover main body in a state of being movable in the horizontal direction while the opening communicates with the internal space.