The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2022

Filed:

Mar. 17, 2022
Applicant:

Euclid Beamlabs, Llc, Solon, OH (US);

Inventors:

Chunguang Jing, Naperville, IL (US);

Scott Ross, Cary, IL (US);

Roman Kostin, Oak Park, IL (US);

Yimei Zhu, East Setauket, NY (US);

Assignee:

Euclid Beamlabs, LLC, Solon, OH (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); H01J 37/26 (2013.01); H01J 2237/026 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/24585 (2013.01);
Abstract

A TEM sample holder enables simultaneous cooling and RF irradiation of a sample. The sample is suspended in a hole that penetrates through a sample stage formed by a dielectric plate having a lower metallic ground layer and an upper metallic lead. The sample stage is supported by an evacuated hollow tube extending from a cryogenic chamber, such as a liquid nitrogen or helium Dewar. A coaxial conductor extends from an ambient connector through the cryogenic chamber and hollow tube to the sample stage, a center conductor and surrounding metallic shield thereof being in thermal and electrical communication with the metallic lead and metallic ground layer respectively of the sample stage, and the metallic shield being is in direct thermal communication with the cryogenic chamber. The coaxial conductor thereby enables simultaneous cooling and RF irradiation of the sample during TEM measurements. Embodiments include a temperature sensor and heater.


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