The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 09, 2022

Filed:

Mar. 11, 2021
Applicant:

Boe Technology Group Co., Ltd., Beijing, CN;

Inventors:

Xinglong Luan, Beijing, CN;

Fuqiang Li, Beijing, CN;

Jing Feng, Beijing, CN;

Zhichong Wang, Beijing, CN;

Peng Liu, Beijing, CN;

Guangcai Yuan, Beijing, CN;

Xue Dong, Beijing, CN;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70291 (2013.01); G02B 26/0833 (2013.01);
Abstract

Provided is a digital exposure control method, including: performing exposure of different types of functional areas of a substrate to be exposed through one or a plurality of full-page scans, wherein scan speeds for different types of functional areas of the substrate to be exposed are different.


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