The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
Dec. 23, 2019
Applicant:
Samsung Sdi Co., Ltd., Yongin-si, KR;
Inventors:
Seunghyun Kim, Suwon-si, KR;
Yushin Park, Suwon-si, KR;
Hyungseok Park, Suwon-si, KR;
Sunghwan Kim, Suwon-si, KR;
Hyeonil Jung, Suwon-si, KR;
Assignee:
SAMSUNG SDI CO., LTD., Yongin-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); C09D 161/12 (2006.01); G03F 7/30 (2006.01); G03F 7/20 (2006.01); G03F 7/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C09D 161/12 (2013.01); G03F 7/162 (2013.01); G03F 7/20 (2013.01); G03F 7/30 (2013.01);
Abstract
A hardmask composition, a hardmask layer, and a method of forming patterns, the composition including a solvent; and a polymer including a structural unit represented by Chemical Formula 1,