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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11408068 B1

PDFFull Text
Date of Patent:
Aug. 09, 2022

Filed:

Feb. 01, 2021

Deposition of tellurium-containing thin films

Applicants:

Applied Materials, Inc., Santa Clara, CA (US);

Wayne State University, Detroit, MI (US);

Inventors:

Thomas Knisley, Livonia, MI (US);

Keenan N. Woods, San Ramon, CA (US);

Mark Saly, Santa Clara, CA (US);

Charles H. Winter, Bloomfield Hills, MI (US);

Apoorva Upadhyay, Ottawa, CA;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:

Servilla Whitney LLC

Primary Examiner:

Elizabeth A Burkhart

Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 16/455 (2006.01); C23C 16/30 (2006.01); C23C 16/44 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C23C 16/30 (2013.01); C23C 16/4408 (2013.01); C23C 16/45527 (2013.01); H01L 21/0228 (2013.01); H01L 21/28506 (2013.01);
Abstract

Methods for depositing tellurium-containing films on a substrate are described. The substrate is exposed to a tellurium precursor and a reactant to form the tellurium-containing film (e.g., elemental tellurium, tellurium oxide, tellurium carbide, tellurium silicide, germanium telluride, antimony telluride, germanium antimony telluride). The exposures can be sequential or simultaneous.

Find Patent Forward Citations

Knisley, Thomas. (2022). Deposition of tellurium-containing thin films (U.S. Patent No. 11408068). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11408068

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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