The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2022

Filed:

Mar. 16, 2020
Applicant:

Magnolia Optical Technologies, Inc., Woburn, MA (US);

Inventors:

Elwood J. Egerton, Hot Springs, SD (US);

Ashok K. Sood, Brookline, MA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); G01J 5/24 (2006.01); G01J 5/04 (2006.01); G01J 5/02 (2022.01); H01L 51/44 (2006.01); H01L 51/42 (2006.01); H01L 27/30 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0048 (2013.01); G01J 5/024 (2013.01); G01J 5/046 (2013.01); G01J 5/24 (2013.01); H01L 27/305 (2013.01); H01L 51/0017 (2013.01); H01L 51/428 (2013.01); H01L 51/44 (2013.01); H01L 51/441 (2013.01);
Abstract

Ultraviolet (UV), Terahertz (THZ) and Infrared (IR) radiation detecting and sensing systems using graphene nanoribbons and methods to making the same. In an illustrative embodiment, the detector includes a substrate, single or multiple layers of graphene nanoribbons, and first and second conducting interconnects each in electrical communication with the graphene layers. Graphene layers are tuned to increase the temperature coefficient of resistance to increase sensitivity to IR radiation. Absorption over a wide wavelength range of 200 nm to 1 mm are possible based on the two alternative devices structures described within. These two device types are a microbolometer based graphene film where the TCR of the layer is enhanced with selected functionalization molecules. The second device structure consists of a graphene nanoribbon layers with a source and drain metal interconnect and a deposited metal of SiO2 gate which modulates the current flow across the phototransistor detector.


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