The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Jul. 16, 2020
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventor:
Jaeoh Bang, Seoul, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H05K 7/20 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H05K 7/20509 (2013.01); H01L 21/68721 (2013.01);
Abstract
A cooling unit for cooling a substrate includes a plate having a fluid channel formed therein and a fluid supply member that supplies a fluid into the fluid channel. The fluid channel includes a plurality of first fluid channels, each of which is connected with the fluid supply member at one end thereof and a second fluid channel that is connected with opposite ends of the plurality of first fluid channels and that discharges the fluid. A buffer space that connects the opposite ends of the plurality of first fluid channels and one end of the second fluid channel is formed inside the plate.