The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2022

Filed:

Mar. 19, 2019
Applicant:

Helmholtz-zentrum Dresden—rossendorf E.v., Dresden, DE;

Inventor:

Tobias Kosub, Dresden, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/04 (2006.01); G01R 27/28 (2006.01); G01R 27/08 (2006.01); G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01N 27/041 (2013.01); G01R 27/08 (2013.01); G01R 27/28 (2013.01); G01R 1/073 (2013.01);
Abstract

A method for continuously determining all of the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types, is disclosed. A continuous determination of all the components of the resistance tensor is facilitated without switching the contact points using a minimum number of contacts. A homogeneous thin film part of any shape is provided with a least three contact points arranged at distances from one another. An input voltage is applied at each of the contact points, the current flowing through the contact points are detected, and the complete resistance tensor of the thin film part is determined from the voltage and current values.


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