The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Apr. 03, 2015
Applicants:
Robert Bosch Gmbh, Stuttgart, DE;
Ando Lars Feyh, Reutlingen, DE;
Gary O'brien, Palo Alto, CA (US);
Inventors:
Ando Lars Feyh, Reutlingen, DE;
Gary O'Brien, Palo Alto, CA (US);
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 9/00 (2006.01); H04R 19/00 (2006.01); G01L 19/04 (2006.01); G01L 19/06 (2006.01); H04R 19/04 (2006.01); B81B 3/00 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0047 (2013.01); B81B 3/0072 (2013.01); G01L 9/0048 (2013.01); G01L 9/0073 (2013.01); G01L 19/04 (2013.01); G01L 19/06 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81C 2201/014 (2013.01); H04R 31/00 (2013.01);
Abstract
A membrane-based sensor in one embodiment includes a membrane layer including an upper surface and a lower surface, a backside trench defined on one side by the lower surface, a central cavity defined on a first side by the upper surface, a cap layer positioned above the central cavity, and a first spacer extending from the upper surface to the cap layer and integrally formed with the cap layer, the first spacer defining a second side of the central cavity and an inner membrane portion of the membrane layer.