The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Sep. 29, 2021
Zhengzhou University, Zhengzhou, CN;
Benshuang Sun, Shizuishan, CN;
Yang Liu, Zhengzhou, CN;
Jilin He, Shizuishan, CN;
Xueyun Zeng, Huangchuan County, CN;
Yongchun Shu, Huangchuan County, CN;
Jie Chen, Zhengzhou, CN;
Zhenhua Hao, Zhengzhou, CN;
ZHENGZHOU UNIVERSITY, Zhengzhou, CN;
Abstract
A variable-temperature and fast-sintering process for an alumina-doped zinc oxide target material is provided. Integrated degreasing and sintering processes are carried out on an alumina-doped zinc oxide biscuit, The degreasing process is carried out in air atmosphere, and a high-density alumina-doped zinc oxide target material is produced by a variable-temperature treatment during the sintering process under a state of circulating controllable mixed atmosphere. The mixed atmosphere is air and oxygen. As a result, a sintering time is greatly reduced, so that a fast-activated sintering is realized to inhibit grain growth.