The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2022
Filed:
Jun. 18, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Xiao-Ming He, Fremont, CA (US);
Cheng-Hsuan Chou, Sunnyvale, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 14/08 (2006.01); C23C 16/455 (2006.01); C23C 16/02 (2006.01); C23C 14/04 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/08 (2013.01); C23C 14/046 (2013.01); C23C 14/34 (2013.01); C23C 16/0281 (2013.01); C23C 16/401 (2013.01); C23C 16/405 (2013.01); C23C 16/45525 (2013.01); B23B 2228/10 (2013.01); B23B 2228/36 (2013.01); Y10T 428/2949 (2015.01);
Abstract
Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.