The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2022
Filed:
Dec. 30, 2020
Knowles Electronics, Llc, Itasca, IL (US);
Zhijun Guo, Buffalo Grove, IL (US);
Knowles Electronics, LLC, Itasca, IL (US);
Abstract
The disclosure relates to a MEMS sensor and an assembly including the MEMS sensor and an electrical circuit disposed in an assembly housing. The sensor includes a suspended structure () having a top diaphragm (), a central electrode () and a bottom diaphragm () connected by a pillar portion (). A peripheral portion of the suspended structure is coupled to a support structure (), forming a low pressure cavity (). The MEMS sensor includes a top electrode () disposed between the top diaphragm and the central electrode and a bottom electrode () disposed between the bottom diaphragm and central electrode each coupled to the support structure, wherein in the event of a sound pressure condition, the suspended structures moves up or down together, while the top electrode and the bottom electrode remain substantially stationary.