The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2022
Filed:
Jun. 13, 2019
Sumitomo Electric Industries, Ltd., Osaka, JP;
Taku Horii, Osaka, JP;
Toru Hiyoshi, Osaka, JP;
SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka, JP;
Abstract
A silicon carbide semiconductor device to be a vertical transistor includes: a silicon carbide semiconductor first layerof a first conductivity type; a silicon carbide semiconductor second layerof a second conductivity type that is different from the first conductivity type on the first layer; a silicon carbide semiconductor third layerof the first conductivity type on the second layer; and a groovehaving a sidewallat portions of the third layer, the second layer, and the first layer, wherein the third layerhas a first areafacing the sidewallof the grooveand a second areafurther away from the sidewallof the groovethan the first area, wherein the second areaand the first areaare continuous, and wherein the second areais provided deeper than the first areafrom a surface side of the third layertoward the first layer