The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 26, 2022

Filed:

Jan. 08, 2020
Applicant:

Korea Advanced Institute of Science and Technology, Daejeon, KR;

Inventors:

Taek-Soo Kim, Daejeon, KR;

Sumin Kang, Daejeon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); H01L 29/786 (2006.01); B32B 37/00 (2006.01); B44C 1/175 (2006.01); C10G 2/00 (2006.01); C10G 31/10 (2006.01); B01D 63/16 (2006.01); C10G 31/09 (2006.01); B01D 65/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/2043 (2013.01); B32B 37/025 (2013.01); B44C 1/175 (2013.01); H01L 29/78603 (2013.01); C10G 2/32 (2013.01); C10G 2300/70 (2013.01); G03F 7/2002 (2013.01); G03F 7/70025 (2013.01);
Abstract

Provided is a selective transfer method including depositing a thin film on a substrate; patterning the thin film using a laser or a tool to acquire a thin film of a target pattern; masking the thin film of the target pattern; selectively controlling a surface wettability through surface treatment of the masked thin film; delaminating the thin film of the target pattern by dipping a surface of the thin film with a wettability changed in response to a completion of the selective surface treatment into a liquid material and by applying a crack opening force capable of delaminating an interface between the thin film and the substrate; and immersing a target substrate into the liquid material when the thin film of the target pattern is floating in the liquid material and then scoop-up transferring the floating thin film of the target pattern.


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