The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2022
Filed:
Aug. 30, 2019
Infineon Technologies Austria Ag, Villach, AT;
Mark Harrison, Wernberg, AT;
Georg Schinner, Munich, DE;
Infineon Technologies Austria AG, Villach, AT;
Abstract
A method of manufacturing a semiconductor device includes: forming one or more transistor cells in a first region of a semiconductor substrate, the semiconductor substrate having a second region that is devoid of transistor cells; forming a first dielectric material over the first and second regions; forming a second dielectric material over the first dielectric material; forming a pn diode in the first dielectric material over the second region; etching first contact grooves into a p-type region of the pn diode, second contact grooves into an n-type region of the pn diode, and third contact grooves into the first region of the semiconductor substrate at the same time using a common contact formation process; and filling the first contact grooves, the second contact grooves and the third contact grooves with an electrically conductive material.