The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2022
Filed:
Apr. 10, 2018
Applicant:
Hitachi, Ltd., Tokyo, JP;
Inventors:
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G06T 7/001 (2013.01); G06T 7/0004 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); G06T 2207/30148 (2013.01);
Abstract
An object of the present invention is to provide a technique that allows automatically generating a processing recipe from an inspection image even when the inspection image varies by being affected by an imaging condition of a processing device. A processing recipe generation device according to the present invention generates a converted image in which components relying on the imaging condition of the inspection image are reduced and generates a processing recipe using a target image generated using a conversion condition same as that of the converted image (see FIG.).