The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2022
Filed:
Jul. 20, 2018
Applicant:
Fujikin Incorporated, Osaka, JP;
Inventors:
Atsushi Hidaka, Osaka, JP;
Takatoshi Nakatani, Osaka, JP;
Keisuke Nakatsuji, Osaka, JP;
Keiji Hirao, Osaka, JP;
Yukio Minami, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Assignee:
FUJIKIN INCORPORATED, Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/52 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
C23C 16/52 (2013.01); H01L 21/31 (2013.01); H01L 21/67017 (2013.01);
Abstract
In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device () comprises a plurality of fluid heating sections () connected to each other and each having a flow path or a fluid accommodating portion inside, heaters () configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (') disposed between adjacent fluid heating sections.