The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 19, 2022

Filed:

Jan. 22, 2019
Applicant:

Fuji Manufacturing Co., Ltd., Tokyo, JP;

Inventors:

Keiji Mase, Tokyo, JP;

Shozo Ishibashi, Tokyo, JP;

Mizuki Sekizawa, Tokyo, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 1/00 (2006.01); B24C 1/08 (2006.01); H01L 21/304 (2006.01); B24C 11/00 (2006.01); H01L 21/687 (2006.01); H01L 21/683 (2006.01); B24C 3/32 (2006.01);
U.S. Cl.
CPC ...
B24C 1/08 (2013.01); B24C 11/00 (2013.01); H01L 21/3046 (2013.01); H01L 21/6875 (2013.01); H01L 21/68757 (2013.01); B24C 3/322 (2013.01); H01L 21/6831 (2013.01);
Abstract

A method for surface treatment of a workpiece made from a hard-brittle material comprises first blasting employing abrasive grains of higher hardness than a hardness of a base material of the workpiece for forming a three dimensional recess-protrusion profile having protrusions and recesses formed between the protrusions on a surface of the workpiece; and second blasting employing an elastic abrasive having a structure in which abrasive grains carried in and/or on an elastic body made from material with low rebound elasticity for polishing the surface of the workpiece formed with the recess-protrusion profile so as to achieve an arithmetic average roughness Ra of not greater than 1.6 μm on the surface of the protrusions and the recesses on the workpiece while maintaining the recess-protrusion profile formed by the first blasting.


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