The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Feb. 13, 2019
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
David Tumpold, Kirchheim b Muenchen, DE;
Alfons Dehe, Villingen Schwenningen, DE;
Christoph Glacer, Munich, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 1/00 (2006.01); H04R 7/06 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); H04R 19/00 (2006.01); H04R 17/02 (2006.01); H04R 17/00 (2006.01);
U.S. Cl.
CPC ...
H02N 1/006 (2013.01); H01L 41/081 (2013.01); H01L 41/0973 (2013.01); H04R 7/06 (2013.01); H04R 17/00 (2013.01); H04R 17/02 (2013.01); H04R 19/005 (2013.01); H04R 2201/003 (2013.01);
Abstract
According to an embodiment, a microelectromechanical systems MEMS device includes a first membrane attached to a support structure that a first plurality of acoustic vents; a second membrane attached to the support structure that includes a second plurality of acoustic vents, where the first plurality of acoustic vents and the second plurality of acoustic vents do not overlap; and a closing mechanism coupled to the first membrane and the second membrane.