The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2022

Filed:

Jul. 05, 2018
Applicants:

Université Grenoble Alpes, Saint Martin d'Hères, FR;

Vermon S.a., Tours, FR;

Inventors:

Libor Rufer, Rives sur Fure, FR;

Skandar Basrour, Grenoble, FR;

Emilie Trioux, Grenoble, FR;

Guillaume Férin, Truyes, FR;

Claire Bantignies, Tours, FR;

Hung Le Khanh, Malakoff, FR;

Bogdan Rosinski, Langeais, FR;

An Nguyen-Dinh, La Riche, FR;

Assignees:

VERMON S.A., Tours, FR;

UNIVERSITE GRENOBLE ALPES, Saint Martin d'Heres, FR;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/113 (2006.01); H01L 41/083 (2006.01); H01L 41/27 (2013.01); H02N 2/18 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1136 (2013.01); H01L 41/0838 (2013.01); H01L 41/27 (2013.01); H02N 2/186 (2013.01);
Abstract

A piezoelectric bimorph cantilever beam system includes a shim having a first main surface, a second main surface opposite the first main surface, a proximal end connected to an anchor, and a distal end opposite the proximal end. The system further includes a first piezoelectric layer laminated on the first main surface of the shim and a second piezoelectric layer laminated on the second main surface of the shim. A first beam stiffener is provided over the first main surface of the shim adjacent to the anchor with the first beam stiffener at least partially covering the first piezoelectric layer. A second beam stiffener is provided over the second main surface of the shim adjacent to the anchor with the second beam stiffener at least partially covering the second piezoelectric layer.


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