The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Jun. 24, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Chongyang Wang, Saratoga, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method includes identifying a bottleneck operation of a plurality of operations in a sequence recipe. The plurality of operations are associated with transporting and processing a plurality of substrates in a substrate processing system. The method further includes determining, based on the bottleneck operation, a takt time for the plurality of substrates. The takt time is an amount of time between a first substrate entering the substrate processing system and a second substrate entering the substrate processing system. The method further includes determining a plurality of queue times. Each of the plurality of queue times corresponds to a respective operation of the plurality of operations. The method further includes causing, based on the takt time and the plurality of queue times, the plurality of substrates to be processed by the substrate processing system.