The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2022

Filed:

Oct. 18, 2019
Applicant:

Beijing Voyager Technology Co., Ltd., Beijing, CN;

Inventors:

Sae Won Lee, Mountain View, CA (US);

Youmin Wang, Berkeley, CA (US);

Qin Zhou, Mountain View, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G01S 17/10 (2020.01); G01S 17/89 (2020.01); G01S 7/481 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0841 (2013.01); G02B 26/105 (2013.01); G01S 7/4817 (2013.01); G01S 17/10 (2013.01); G01S 17/89 (2013.01);
Abstract

Embodiments of the disclosure provide a micromachined mirror assembly. The micromachined mirror assembly includes a micro mirror, a first suspended beam, a second suspended beam, a first actuator, and a second actuator. The micro mirror is configured to tilt around an axis. The first suspended beam and second suspended beam each is mechanically coupled to the micro mirror along the axis. The first actuator is mechanically coupled to the first suspended beam and configured to apply a first torsional stress around the axis to the first suspended beam. The second actuator is mechanically coupled to the second suspended beam and configured to apply a second torsional stress around the axis to the second suspended beam. the first torsional stress and second torsional stress have a magnitude difference.


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