The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
May. 26, 2021
Seiko Epson Corporation, Tokyo, JP;
Teruo Takizawa, Matsumoto, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
An inertial sensor includes a substrate and a structure disposed on the substrate. The structure includes a detection movable body which overlaps the substrate in a direction along a Z-axis and includes a movable detection electrode, a detection spring that supports the detection movable body, a drive portion that drives the detection movable body in a direction along an X-axis with respect to the substrate, a fixed detection electrode fixed to the substrate and facing the movable detection electrode, a first compensation electrode for applying an electrostatic attraction force having a first direction component different from the direction along the X-axis to the detection movable body, and a second compensation electrode for applying an electrostatic attraction force having a second direction component opposite to the first direction component to the detection movable body. One of the first compensation electrode and the second compensation electrode includes an adjustment portion that adjusts magnitude of the electrostatic attraction force.