The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Apr. 25, 2017
Applicant:
Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;
Inventors:
Riikka Puurunen, Espoo, FI;
Feng Gao, Espoo, FI;
Assignee:
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY, Espoo, FI;
Primary Examiner:
Int. Cl.
CPC ...
G01B 21/08 (2006.01); G01B 21/00 (2006.01); C23C 16/52 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
G01B 21/08 (2013.01); C23C 16/045 (2013.01); C23C 16/52 (2013.01); G01B 21/00 (2013.01);
Abstract
An apparatus associated with an analysis of a thin film layer comprises two layer structures () with a cavity () therebetween, and an opening () through one of the layer structures () to the cavity (), the cavity () being configured to receive, through the opening (), material used to form a thin film layer () inside the cavity (). At least one of the two layer structures () comprises at least one positional indicator () for an analysis associated with the thin film layer ().