The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2022
Filed:
Mar. 20, 2019
Edwards Japan Limited, Yachiyo, JP;
Hideo Fukami, Yachiyo, JP;
Yoshinobu Ohtachi, Yachiyo, JP;
Yasushi Maejima, Yachiyo, JP;
Tsutomu Takaada, Yachiyo, JP;
Edwards Japan Limited, Yachiyo, JP;
Abstract
The present disclosure can provide a vacuum pump capable of obtaining a rotation direction and correcting the rotation direction without adding a dedicated rotation direction sensor even in a state of low-speed rotation. The control device is capable of obtaining at least a first state in which a rotor shaft rotates at relatively high speed, and a second state in which the rotor shaft deviates within a gap between the rotor shaft and a protective bearing and rotates at relatively low speed while revolving, acquires output information of a radial displacement sensor, obtains a rotation direction of the rotor shaft in the second state on the basis of the output information, determines whether the rotation direction is normal or not, and when the rotation direction is not normal, stops the rotation and increases rotation speed to achieve a normal rotation direction.